From Laboratory Innovation to Industrial Manufacturing
Scaling ALD for Supercapacitor Production in the ARMS Program
Moving supercapacitor innovations from laboratory research to industrial manufacturing requires early focus on scalability. Within the ARMS program, Beneq’s role is to translate academic atomic layer deposition (ALD) processes into stable, manufacturable solutions suitable for production environments.
From Proof to Manufacturable Reality
Within ARMS, materials and ALD processes are first validated on Beneq TFS 200 R&D equipment in academic laboratories.
Progress toward manufacturing requires a shift from experimental optimization to defined operating conditions suitable for reliable, repeatable production.
This shift is governed by practical requirements such as substrate format, output volume, throughput, thermal limits, and cost, guiding process transfer from laboratory tools to industrial batch ALD, and onward to large batch scale equipment and spatial roll-to-roll platforms.
What Beneq Delivers in ARMS
Beneq is responsible for de-risking the transition from validated ALD concepts to industrially deployable processes. This includes selecting scalable approaches, adapting them to production-grade ALD platforms, and verifying performance under manufacturing-relevant conditions.
Proven Industrial ALD Platforms
Beneq’s contribution to ARMS builds on extensive experience in industrial ALD across multiple markets:
- P-series batch ALD for high-volume semiconductor component coating
- SCS 1000 sheet-to-sheet coater, for high-throughput prototyping
- Genesis roll-to-roll ALD for continuous, high-throughput manufacturing
Beneq P1500, world’s largest batch ALD
production platform
These platforms represent established and emerging production use cases, demonstrating Beneq’s ability to scale ALD to industrial manufacturing.
Expertise Driving Commercialization
ARMS activities at Beneq are led by Dr. Andrew Cook, whose background in spatial ALD and industrial scale-up supports the transition of laboratory innovations into production-ready processes since 2014. Together with Beneq’s spatial ALD team, he brings extensive experience in commercializing ALD technologies across thin-film processing, optical, and energy-related applications.
Dr. Andrew Cook with the Beneq WCS 600
roll-to-roll system (image credit: CPI UK)
Enabling Industrial Impact
Through ARMS, Beneq supports the progression of supercapacitor technologies from laboratory innovation to industrial reality. By combining ALD expertise, scalable platforms, and manufacturing-focused development, Beneq helps ensure that promising research outcomes can be realized at production scale.